Ultra-thin Chip Technology and Applications
Joachim Burghartz
Ultra-thin chips are the ''smart skin'' of a conventional silicon chip. This book shows how very thin and flexible chips can be fabricated and used in many new applications in microelectronics, Microsystems, biomedical and other fields. It provides a comprehensive reference to the fabrication technology, post processing, characterization and the applications of ultra-thin chips.
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The book removed at the request of the copyright holder.
