This reference reveals the most significant technologies, procedures, and trends in the design and application of actuator devices for micromechatronic systems. It addresses critical design and manufacturing concepts, as well as challenges in the modeling and regulation of electromechanical losses and heat generation in actuator devices. Accompanied by a CD-ROM demonstrating examples of finite-element modeling and previously developed and commercially available actuators, Micromechatronics provides insight into the future of this evolving field, and considers recent developments in micropositioning technology and displacement transducer, motor, and ultrasonic motor applications.