The world now stands at the brink of a technological revolution. Micro- and nano-engineering will ultimately change the very nature of most human-made structures, devices, and systems, and will lead to unprecedented breakthroughs in a wide range of applications. For it to reach its full potential, today's engineers must understand the various methods, techniques, and technologies used to formulate, design, and optimize high-performance micro-electromechanical and nano-electromechanical systems (MEMS and NEMS).Nano- and Micro-electromechanical Systems builds the theoretical foundation needed to develop, analyze, and prototype NEMS and MEMS, their components, and their structures. It illustrates how to perform the studies and analyses of nano- and micro-scale processes, phenomena, and properties essential to solving a wide array of engineering problems and addresses the solution of these problems in the context of specific applications.Designed for a one-semester course, Nano- and Micro-electromechanical Systems provides the background students need to model, design, simulate, control, implement, and deploy NEMS and MEMS. Most importantly, it prepares them to continue research in this challenging field and contribute to its further advancement.