This is a fine books that presents a basic foundation for MEMS modeling. However, I have few critiques about it:



1- It does not discuss magnetostriction modeling.

2- It does not discuss electro-thermal-elastic modeling (Current causes Joule heating, causing deflection).

3- It does not discuss electrokinetics.



Overall, it is a good start.



Huy Le (teaching MEMS modeling)

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