Shape and functional elements of the bulk silicon microtechnique: a manual of wet-etched silicon structures

This manual presents a survey of the form-related and functional elements of the bulk silicon microtechnique. A systematic description of simple shape elements and of elements for mechanical, fluidic and optical applications is given. It includes practical instructions for the use of the relevant techniques and an extensive collection of examples for the support of the search for applications via photographs, drawings and references. Especially written for producers of sensors and microtechnical components. it serves as a valuable guide to the design of etch masks and processes while summarizing the important properties of silicon.