libcats.org
Главная

Rapid Thermal Processing for Future Semiconductor Devices

Обложка книги Rapid Thermal Processing for Future Semiconductor Devices

Rapid Thermal Processing for Future Semiconductor Devices

This volume is a collection of papers which were presented at the 2001 International Conference on Rapid Thermal Processing (RTP 2001) held at Ise Shima, Mie, on November 14-16, 2001. This symposium is second conference followed the previous successful first International RTP conference held at Hokkaido in 1997. The RTP 2001 covered the latest developments in RTP and other short-time processing continuously aiming to point out the future direction in the Silicon ULSI devices and II-VI, III-V compound semiconductor devices.This book covers the following areas: advanced MOS gate stack, integration technologies, advancd channel engineering including shallow junction, SiGe, hetero-structure, novel metallization, inter-connect, silicidation, low-k materials, thin dielectrics including gate dielectrics and high-k materials, thin film deposition including SiGe, SOI and SiC, process and device modelling, Laser-assisted crystallization and TFT device fabrication technologies, temperature monitoring and slip-free technologies.
Популярные книги за неделю:

50 рецептов для аэрогриля

Автор:
Категория: house, house, cook
Размер книги: 771 Kb

Ключ к сверхсознанию

Автор:
Категория: Путь к себе
Размер книги: 309 Kb

Contemporary Theatre, Film and Television, Volume 97

Автор:
Размер книги: 3.18 Mb
Только что пользователи скачали эти книги:

Навеки твой

Автор:
Размер книги: 892 Kb

My Brother

Автор:
Размер книги: 457 Kb

Christian Astrology, Books 1 and 2

Автор:
Размер книги: 4.79 Mb

Theory and Practice of Radiation Thermometry

Автор: , Автор:
Категория: engeneering_technology
Размер книги: 50.00 Mb

The Composition of Meaning: From Lexeme to Discourse

Автор: , Автор:
Размер книги: 1.43 Mb

Chromic Phenomena: Technological Applications of Colour Chemistry

Автор: , Автор:
Категория: Ch_Chemistry
Размер книги: 6.43 Mb

The Vines in Splendour

Автор:
Категория: fiction
Размер книги: 355 Kb